EFEM-compatible wafer level fully automatic dispensing machine FAD5100S-WH
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/products/full-automatic-dispensing-machine/semiconductorEFEM Compatible Wafer Level Fully Automatic Dispensing Machine FAD5100S-WH
High precision wafer management solution
Remapping results of production and fillet inspection with wafer arrangement software (SECS/GEM compliance)
・ High-speed application by non-stop continuous operation
・ High-speed alignment with non-stop continuous operation:
Mu SKY Capture Function
・ Automation of application volume management: DVM Function
・ Forming the ideal application pattern "Leafline" for void avoidance: MCD Function [PAT.P]
・ Preventing large numbers of defects: AFC Function
・Equipped with wafer mapping function
・Fully automatic production connected to EFEM is possible
・Wafer and FOUP support
・Wafer Mapping Function
・Remapping results (SECSGEM compatible) ※Option
・ High-speed alignment with non-stop continuous operation:
Mu SKY Capture Function
・ Automation of application volume management: DVM Function
・ Forming the ideal application pattern "Leafline" for void avoidance: MCD Function [PAT.P]
・ Preventing large numbers of defects: AFC Function
・Equipped with wafer mapping function
・Fully automatic production connected to EFEM is possible
・Wafer and FOUP support
・Wafer Mapping Function
・Remapping results (SECSGEM compatible) ※Option
EFEM (equipment front end module)
EFEM is a module device that loads and unloads wafers, and plays a role in automatically removing wafers from FOUP (Front Opening Unified Pod) or containers called wafer cassettes while maintaining clean room standards.
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Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
SPECIFICATION Outline Specification
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Name
Fully automatic wafer level dispensing machine FAD5100S-WH
Model
FAD5100S-WH
Control method
PC/PLC control (SMEMA compliance)
Applicable workpiece
12" wafer, 8" wafer
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
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