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EFEM-compatible wafer level fully automatic dispensing machine FAD5100S-WH

EFEM-compatible wafer level fully automatic dispensing machine FAD5100S-WH

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/products/full-automatic-dispensing-machine/semiconductorEFEM-compatible wafer level fully automatic dispensing machine FAD5100S-WH

High-precision wafer management solution
Remapping the results of production and fillet inspection with wafer array compatible software (SECS/GEM compliant)

EFEM-compatible wafer level Full automatic dispensing machine FAD5100S-WH Image -1

About after-sales service

・ High-speed application by non-stop continuous operation
・ High-speed alignment with non-stop continuous operation:
　Mu SKY Capture Function
・ Automate the control of the amount of application: DVM function
・ Formation of the application pattern "Leaf Line" ideal for avoiding voids: MCD function [PAT.P]
・ Prevention of mass defects: AFC Function
・Equipped with wafer mapping function
・Full automatic production connected to EFEM is possible.
・Wafer and FOUP support
・Wafer mapping function
・Remapping results (supported with SECSGEM) ※Option

What is the Equipment Front End Module (EFEM)?
EFEM is a module device that loads and unloads wafers, and is responsible for automatically removing wafers and transporting them to process equipment while maintaining clean room standards from FOUP: Front Opening Unified pods (FOUP) and containers called wafer cassettes.

SPECIFICATION outline specifications

Name
Full automatic wafer level dispensing machine FAD5100S-WH
Model
FAD5100S-WH
Control method
PC/PLC control (SMEMA compliance)
Applicable work
12 wafers, 8 wafers

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