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EFEM-compatible high-end dispensing machine FAD5700 - WH

EFEM-compatible high-end dispensing machine FAD5700 - WH

TOP ＞ Fully automatic dispensing machine ＞ Application equipment ＞ EFEM-compatible high-end dispensing machine FAD5700 - WH

/products/full-automatic-dispensing-machine/semiconductorEFEM-compatible high-end dispensing machine FAD5700 WH

Integrated solutions that open up a new era of wafer processing
Remapping results of production and fillet inspection with wafer arrangement software (SECS/GEM compliance)

EFEM-compatible high-end dispensing machine FAD5700 - Image of WH -1

About after-sales service

Point
・Support for cutting-edge semiconductor processes (WLP, chiplet, and heterogeneous chip integration)
・Can be applied to Industry's highest standard KOZ
・Fully automatic production connected to EFEM is possible
Update
・Equipped with multi-head independent control and automatic coating weight correction function.
・The latest UI that contributes to labor saving.

・High-speed alignment with non-stop continuous operation:
　Mu SKY Capture Function
・Height measurement by non-stop continuous operation:
　Mu SKY Sensing Function
・Automation of application volume management: DVM Function
・Preventing large numbers of defects: AFC Function
・Wafer and FOUP support
・Wafer Mapping Function
・Remapping results (SECSGEM compatible) ※Option

EFEM (equipment front end module)
EFEM is a module device that loads and unloads wafers, and plays a role in automatically removing wafers from FOUP (Front Opening Unified Pod) or containers called wafer cassettes while maintaining clean room standards.

SPECIFICATION Outline Specification

Name
DISPENS MASTER
Model
FAD5700-WH
Control method
PC/PLC control (SMEMA compliance)

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