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EFEM-compatible high-end dispense machine FAD5700 - WH

EFEM-compatible high-end dispense machine FAD5700 - WH

TOP ＞ Fully automatic dispensing machine ＞ Coating equipment ＞ EFEM-compatible high-end dispense machine FAD5700 - WH

/products/full-automatic-dispensing-machine/semiconductor EFEM compatible high-end dispense machine FAD5700 ーWH

Integrated solutions that open up a new era of wafer processing
Remapping the results of production and fillet inspection with wafer array compatible software (SECS/GEM compliant)

EFEM-compatible high-end dispense machine FAD5700 - Image of WH - 1

About after-sales service

Point
・Support for cutting-edge semiconductor processes (WLP/chiplet/diverse chip integration)
・It can be applied to the highest level of KOZ in Industry
・Full automatic production connected to EFEM is possible.
Update
・Equipped with multi-head independent control and automatic application weight correction function.
・The latest UI that contributes to labor saving.

・High-speed alignment with non-stop continuous operation:
　Mu SKY Capture Function
・Height measurement by unstoppable continuous operation:
　Mu SKY Sensing Function
・Automate the control of the amount of application: DVM function
・Prevention of mass defects: AFC Function
・Wafer and FOUP support
・Wafer mapping function
・Remapping results (supported with SECSGEM) ※Option

What is the Equipment Front End Module (EFEM)?
EFEM is a module device that loads and unloads wafers, and is responsible for automatically removing wafers and transporting them to process equipment while maintaining clean room standards from FOUP: Front Opening Unified pods (FOUP) and containers called wafer cassettes.

SPECIFICATION outline specifications

Name
DISPENS MASTER
Model
FAD5700-WH
Control method
PC/PLC control (SMEMA compliance)